DocumentCode
1411351
Title
Low dielectric constant materials, vol. 565 [Book Review]
Author
Shea, John
Volume
16
Issue
6
fYear
2000
Firstpage
42
Lastpage
42
Keywords
Book reviews; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Fabrication; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Semiconductor materials; Silicon compounds;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2000.887602
Filename
887602
Link To Document