Title :
Low dielectric constant materials, vol. 565 [Book Review]
Keywords :
Book reviews; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Fabrication; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Semiconductor materials; Silicon compounds;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2000.887602
