• DocumentCode
    1411355
  • Title

    Materials science of microelectromechanical systems (MEMS) devices, vol. 546 [Book Reviews]

  • Author

    Shea, John

  • Volume
    16
  • Issue
    6
  • fYear
    2000
  • Firstpage
    42
  • Lastpage
    42
  • Keywords
    Book reviews; Dielectric constant; Dielectric materials; Fabrication; Materials science and technology; Mechanical factors; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Semiconductor materials;
  • fLanguage
    English
  • Journal_Title
    Electrical Insulation Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    0883-7554
  • Type

    jour

  • DOI
    10.1109/MEI.2000.887603
  • Filename
    887603
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1411355