Title :
A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
Author :
Prashanthi, K. ; Naresh, M. ; Seena, V. ; Thundat, T. ; Rao, V. Ramgopal
Author_Institution :
Univ. of Alberta, Edmonton, AB, Canada
fDate :
4/1/2012 12:00:00 AM
Abstract :
This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.
Keywords :
energy harvesting; microfabrication; micromechanical devices; nanocomposites; nanoparticles; photochemistry; photolithography; photoplasticity; piezoelectric materials; piezoelectricity; zinc compounds; MEMS applications; ZnO; energy harvesting; nanoparticles; optical transparency; photolithography-based microfabrication; photopatternability; photoplastic piezoelectric nanocomposite; photoplastic piezoelectric nanocomposite route; photosensitive SU-8 polymer matrix; piezoelectric microelectromechanical systems; piezoelectric property; Gold; Micromechanical devices; Nanobioscience; Polymers; Strain; Vibrations; Zinc oxide; Microelectromechanical systems (MEMS); SU-8 polymer; ZnO; nanocomposites; piezoelectric;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2011.2178118
