Title :
Polymer surfaces, interfaces and thin films [Book Reviews]
Keywords :
Book reviews; Dielectric constant; Dielectric materials; Dielectric thin films; Fabrication; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Polymer films; Semiconductor materials;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2000.887604
