DocumentCode
1411361
Title
Polymer surfaces, interfaces and thin films [Book Reviews]
Author
Shea, John
Volume
16
Issue
6
fYear
2000
Firstpage
42
Lastpage
43
Keywords
Book reviews; Dielectric constant; Dielectric materials; Dielectric thin films; Fabrication; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Polymer films; Semiconductor materials;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2000.887604
Filename
887604
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