Title :
CW-laser crystallisation of amorphous SiC alloys
Author :
Palma, C. ; Rossi, M.C. ; Sapia, C.
Author_Institution :
Dipt. di Fisica, Rome Univ., Italy
fDate :
7/9/1998 12:00:00 AM
Abstract :
CW-laser crystallisation of amorphous silicon carbon alloys has been performed. It is shown that crystalline SiC can be obtained by irradiating nearly stoichiometric alloys, whereas phase segregation effects occur in silicon-rich alloys
Keywords :
amorphous semiconductors; crystallisation; laser beam effects; segregation; silicon compounds; CW laser crystallisation; SiC; amorphous silicon carbon alloy; phase segregation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980974
