DocumentCode
1411775
Title
CW-laser crystallisation of amorphous SiC alloys
Author
Palma, C. ; Rossi, M.C. ; Sapia, C.
Author_Institution
Dipt. di Fisica, Rome Univ., Italy
Volume
34
Issue
14
fYear
1998
fDate
7/9/1998 12:00:00 AM
Firstpage
1430
Lastpage
1431
Abstract
CW-laser crystallisation of amorphous silicon carbon alloys has been performed. It is shown that crystalline SiC can be obtained by irradiating nearly stoichiometric alloys, whereas phase segregation effects occur in silicon-rich alloys
Keywords
amorphous semiconductors; crystallisation; laser beam effects; segregation; silicon compounds; CW laser crystallisation; SiC; amorphous silicon carbon alloy; phase segregation;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980974
Filename
706121
Link To Document