A new and simple concept of tunable two-chip microcavities for filter applications in WDM systems

Author

Aziz, M. ; Pfeifer, Jason ; Wohlfarth, M. ; Luber, C. ; Wu, S. ; Meissner, P.

Author_Institution

Tech. Hochschule Darmstadt, Germany

Volume

12

Issue

11

fYear

2000

Firstpage

1522

Lastpage

1524

Abstract

A new and simple two-chip concept for microcavities with application in dense wavelength-division-multiplexed systems as tunable optical filters is presented. The Fabry-Perot cavity is created without any costly distance holder or sacrificial layer by simply utilizing the stress of the dielectric Bragg-mirrors against the semiconductor substrate. Electrostatic tunability is achieved by making use of the high capacitance of the metallized cantilevers holding the actuable membrane.

Keywords

Fabry-Perot resonators; integrated optics; micromechanical resonators; mirrors; optical communication equipment; optical tuning; optical waveguide filters; wavelength division multiplexing; Fabry-Perot cavity; WDM systems; actuable membrane; dense wavelength-division-multiplexed systems; dielectric Bragg-mirrors; electrostatic tunability; filter applications; high capacitance; metallized cantilevers; semiconductor substrate; tunable optical filters; tunable two-chip microcavities; two-chip concept; Biomembranes; Capacitance; Dielectric substrates; Electrostatics; Fabry-Perot; Metallization; Microcavities; Optical filters; Stress; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.887731

Filename

887731