Title :
Influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR in Co/Cu multilayers
Author :
Miura, S. ; Takahashi, D. ; Tsunoda, M. ; Takahashi, M.
Author_Institution :
Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan
fDate :
7/1/1998 12:00:00 AM
Abstract :
The influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR was investigated on Co/Cu multilayers. The MR ratio increased from 12% to 27%, when the chamber pressure, Pb before introducing Ar was changed from 5×10-8 Torr to 2×10-5 Torr by leaking air. From structural analysis, the multilayer fabricated with Pb=2×10-5 Torr has a small grain diameter and a relatively flat stacking structure. Co layers in the multilayer fabricated under highly purified atmosphere and excessively contaminated atmosphere, behaved as particulates in lower temperature
Keywords :
cobalt; copper; giant magnetoresistance; grain size; magnetic multilayers; sputter deposition; 5E-8 to 2E-5 torr; Co-Cu; flat stacking structure; giant magnetoresistance; impurity gas; microstructure; multilayers; sputtering atmosphere; structural analysis; Argon; Atmosphere; Conductivity; Impurities; Magnetic field measurement; Magnetic multilayers; Microstructure; Plasma measurements; Plasma temperature; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
