The effect of magnetic film structure on the inductance of a planar inductor

Author

Inoue, T. ; Nishijima, K. ; Yatabe, S. ; Mizoguchi, T. ; Sato, T.

Author_Institution

Semiconduct. Div., Toshiba Corp., Kawasaki, Japan

Volume

34

Issue

4

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

1372

Lastpage

1374

Abstract

Magnetic flux density distribution for a planar magnetic film inductor was calculated as a function of magnetic film thickness, permeability, in-plane slit width and undulation amplitude and insulator thickness which was inserted between magnetic films. It is important to choose a proper combination of magnetic film thickness, permeability and insulator thickness to design inductance and superimposed dc current characteristic of a planar inductor in which the magnetic film structure is multi-layered. Magnetic film slit width doesn´t influence on inductance. It is important to decrease undulation amplitude of a magnetic film

Keywords

inductance; inductors; magnetic flux; magnetic multilayers; magnetic permeability; magnetic thin film devices; dc current characteristic; in-plane slit width; inductance; insulator thickness; magnetic film structure; magnetic film thickness; magnetic films; magnetic flux density distribution; multi-layered film; permeability; planar inductor; planar magnetic film inductor; undulation amplitude; Bismuth; Coils; Inductance measurement; Inductors; Insulation; Magnetic films; Magnetic flux; Magnetic flux density; Permeability; Spirals;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.706552

Filename

706552