Title :
Nanomechanical properties of CNx overcoats and cathodic arc carbon (CAC) films
Author :
Hsiao, Raymond C. ; Bogy, David B. ; Bhatia, C.Singh
Author_Institution :
Comput. Mech. Lab., California Univ., Berkeley, CA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
The nano-wear behavior of nitrogenated carbon films that were deposited on disks at various bras was studied. It was found that the deposition bias played an important role In determining nanomechanical properties of CNx films. Nano-indentation and wear tests were also performed on a cathodic arc carbon (CAC) film for which the mechanical properties vary along the thickness direction
Keywords :
carbon; carbon compounds; magnetic disc storage; nanostructured materials; plasma arc sprayed coatings; wear resistant coatings; wear testing; C; CAC film; CN; CNx overcoats; cathodic arc carbon films; deposition bias; disks; magnetic disks; mechanical properties; nano-indentation; nano-wear behavior; nanomechanical properties; nitrogenated carbon films; wear tests; Adhesives; Electrical resistance measurement; Filters; Scanning probe microscopy; Semiconductor films; Substrates; Surface cracks; Surface topography; Testing; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on