DocumentCode
1414289
Title
In-situ alumina recession and protrusion measurement on a magnetic head
Author
Li, Yufeng ; Wang, Geng
Author_Institution
Samsung Inf. Syst. America, San Jose, CA, USA
Volume
34
Issue
4
fYear
1998
fDate
7/1/1998 12:00:00 AM
Firstpage
1771
Lastpage
1773
Abstract
A method is proposed in this study to measure the alumina recession and protrusion of a magnetic head. This method is accurate and efficient, eliminates the ambiguity caused by reference plane selection, and can be easily implemented during flying height measurement. It also can be extended to measure the minimum flying height of an air-bearing surface, and more accurately evaluate the flying height standard variation of a HGA manufacturing process
Keywords
alumina; height measurement; magnetic heads; surface topography measurement; Al2O3; HGA manufacturing process; air bearing surface; alumina protrusion; alumina recession; flying height measurement; in situ measurement; magnetic head; Atom optics; Atomic force microscopy; Atomic measurements; Force measurement; Glass; Magnetic heads; Optical microscopy; Optical sensors; Performance evaluation; Time measurement;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.706701
Filename
706701
Link To Document