Surface Input/Output Optical Splitter Film for Multilayer Optical Circuits

Author

Lee, Woo-Jin ; Hwang, Sung Hwan ; Kim, Myoung Jin ; Jung, Eun Joo ; An, Jong Bea ; Kim, Gye Won ; Jeong, Myung Yung ; Rho, Byung Sup

Author_Institution

Nano-Photonics Res. Center, Korea Photonics Technol. Inst., Gwangju, South Korea

Volume

24

Issue

6

fYear

2012

fDate

3/15/2012 12:00:00 AM

Firstpage

506

Lastpage

508

Abstract

A polymeric splitter film with input/output apertures on the surface is presented for multilayer optical circuits. We fabricated the surface input/output splitter via an ultraviolet imprint method using a mirror-integrated master. To fabricate the master, waveguide patterns were formed on a silicon wafer using a deep reactive ion etching method, and 45° angled mirrors as beam reflector were constructed at the waveguide core patterns via a V-sawing technique. We subsequently manufactured 1×2 and 1×4 surface input/output optical splitters and measured the optical characteristics of the splitters.

Keywords

elemental semiconductors; integrated optics; mirrors; optical elements; optical fabrication; optical multilayers; silicon; sputter etching; Si; V-sawing technique; beam reflector; deep reactive ion etching method; mirror-integrated master; mirrors; multilayer optical circuits; polymeric splitter film; surface input/output optical splitter film; ultraviolet imprint method; Mirrors; Optical device fabrication; Optical films; Optical interconnections; Optical surface waves; Optical waveguides; Surface waves; 45$^{circ}$ angled mirror; V-sawing; multilayer optical circuit; optical interconnection; polymer optical waveguide; splitter;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2011.2182641

Filename

6122054