Title :
Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness
Author :
Toney, Michael F. ; Mate, C. Mathew ; Pocker, Daryl
Author_Institution :
Div. of Res., IBM Almaden Res. Center, San Jose, CA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
X-ray reflectivity (XRR) has been used as an absolute measurement of the thickness of perfluoropolyether (PFPE) lubricant layers on silicon substrates to determine the validity of thickness measurements by electron spectroscopy for chemical analysis (ESCA) and ellipsometry. Excellent agreement is found between these three methods, provided that a 25 Å escape depth for the PFPE film is used in ESCA and the bulk refractive index of the PFPE is used in ellipsometry. It is also essential to properly account for adventitiously adsorbed hydrocarbons
Keywords :
X-ray photoelectron spectra; calibration; ellipsometry; lubrication; polymer films; thickness measurement; ESCA; PFPE film; X-ray reflectivity; absolute measurement; adsorbed hydrocarbon; calibration; ellipsometry; escape depth; perfluoropolyether lubricant thickness; refractive index; silicon substrate; Chemical analysis; Electrons; Ellipsometry; Lubricants; Optical films; Reflectivity; Silicon; Spectroscopy; Substrates; Thickness measurement;
Journal_Title :
Magnetics, IEEE Transactions on
