Title :
Theoretical study of method based on ellipsometry for measurement of complex permittivity of materials
Author :
Sagnard, F. ; Bentabet, F. ; Vignat, C.
Author_Institution :
Lab. Syst. de Commun., Marne-La-Vallee, France
fDate :
10/26/2000 12:00:00 AM
Abstract :
A new approach, based on ellipsometry and adapted to microwave frequencies, is presented for the in situ measurement of the complex permittivity of materials. The work serves to characterise the accuracy and the sensitivity of the method
Keywords :
permittivity measurement; complex permittivity measurement; ellipsometry based technique; in situ measurement; microwave frequencies; sensitivity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001313
