Integrated LC Filter on Silicon for DC–DC Converter Applications

Author

Artillan, Ph ; Brunet, M. ; Bourrier, D. ; Laur, J.-P. ; Mauran, N. ; Bary, L. ; Dilhan, M. ; Estibals, B. ; Alonso, C. ; Sanchez, J.L.

Author_Institution

LAAS, Centre Nat. de la Rech. Sci. (CNRS), Toulouse, France

Volume

26

Issue

8

fYear

2011

Firstpage

2319

Lastpage

2325

Abstract

The integration of passive components on silicon for future dc-dc converter applications is still a challenging area of research. This paper reports the microfabrication of a fully integrated filter containing a spiral inductor on top of a 3-D capacitor. A thin magnetic shielding layer is introduced between the two components demonstrating that losses caused by the inductor in the capacitor area are reduced, thus increasing the maximum working frequency of the whole component. The fabricated filter was characterized in a test circuit (buck-type converter).

Keywords

DC-DC power convertors; capacitors; elemental semiconductors; filters; inductors; magnetic shielding; silicon; 3D capacitor; DC-DC converter; Si; buck-type converter; integrated LC filter; magnetic shielding; silicon; spiral inductor; Capacitors; Converters; Inductors; Magnetic noise; Magnetic separation; Magnetic shielding; Substrates; Capacitors; electromagnetic induction; energy conversion; inductors; integrated circuit fabrication; magnetic shielding;

fLanguage

English

Journal_Title

Power Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0885-8993

Type

jour

DOI

10.1109/TPEL.2010.2102776

Filename

5677475