Title :
Integrated array of gas sensors
Author :
Anisimkin, V.I. ; Krystal, R.G. ; Medved, A.V. ; Verona, E. ; Zemlyakov, V.E.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
fDate :
6/25/1998 12:00:00 AM
Abstract :
A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction
Keywords :
gas sensors; pattern recognition; surface acoustic wave sensors; ST-cut quartz substrate; SiO2; gas sensors; mechanical displacement components; pattern recognition purposes; propagation direction; sorbent film; surface acoustic wave multi-channel sensor array;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980927
