Title :
Integrated optics in silicon and SiGe-heterostructures
Author :
Schüppert, Bernd ; Schmidtchen, Joachim ; Splett, Armin ; Fischer, Uwe ; Zinke, Thomas ; Moosburger, Rudolf ; Petermann, Klaus
Author_Institution :
Fachgebiet Hochfrequenztech., Tech. Univ. Berlin, Germany
fDate :
10/1/1996 12:00:00 AM
Abstract :
This paper reviews various techniques and ideas in the field of integrated optics in silicon, mainly focused on silicon in conjunction with germanium. We will discuss different approaches for waveguides, passive and active components in silicon as well as recent developments in the fabrication and performance of such components. For waveguides in silicon, the characteristics such as losses and spot-sizes are given, showing that silicon could be an attractive candidate for integrated optical devices
Keywords :
Ge-Si alloys; elemental semiconductors; integrated optics; optical communication equipment; optical fabrication; optical losses; optical planar waveguides; reviews; semiconductor heterojunctions; semiconductor materials; silicon; silicon-on-insulator; Si; Si-SiGe; Si-SiO2; SiGe; SiGe-heterostructures; active components; fabrication; integrated optical devices; integrated optics; losses; passive components; reviews; spot-sizes; waveguides; Electromagnetic wave absorption; Integrated optics; Optical devices; Optical losses; Optical materials; Optical receivers; Optical refraction; Optical waveguides; Photodiodes; Silicon;
Journal_Title :
Lightwave Technology, Journal of
