Low-loss passive polymer optical waveguides with high environmental stability

Author

Usui, Mitsuo ; Hikita, Makoto ; Watanabe, Toshio ; Amano, Michiyuki ; Sugawara, Shungo ; Hayashida, Shoichi ; Imamura, Saburo

Author_Institution

NTT Opto-Electron. Labs., Tokyo, Japan

Volume

14

Issue

10

fYear

1996

fDate

10/1/1996 12:00:00 AM

Firstpage

2338

Lastpage

2343

Abstract

Deuterated polysiloxane with high transparency and high thermal stability was newly synthesized for use as optical waveguide material. Single-mode channel waveguides using the polymer were fabricated by conventional photolithography and dry etching. The propagation loss of the channel waveguides was measured and found to be 0.17 dB/cm at 1.31 μm and 0.43 dB/cm at 1.55 μm. The thermal and environmental stability of the waveguides was demonstrated by the fact that the propagation loss remained unchanged after tests at 200°C for 30 min, at 120°C for 1000 h, and at 75°C and 90% RH for 1000 h

Keywords

environmental factors; etching; optical communication; optical fabrication; optical losses; optical polymers; optical testing; optical waveguides; photolithography; thermal stability; transparency; 1.31 mum; 1.55 mum; 1000 h; 120 C; 200 C; 30 min; 75 C; channel waveguides; deuterated polysiloxane; dry etching; environmental stability; low-loss passive polymer optical waveguides; optical waveguide material; photolithography; propagation loss; single-mode channel waveguides; thermal stability; transparency; Optical interferometry; Optical losses; Optical polymers; Optical refraction; Optical ring resonators; Optical sensors; Optical variables control; Optical waveguides; Propagation losses; Thermal stability;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.541226

Filename

541226