Monolithic integration of MQW modulators on an optical multiplexer on InP for 100 Gb/s transmission

Author

Zamkotsian, F. ; Sato, Kenji ; Okamoto, Hiroshi ; Kishi, Kenji ; Kotaka, Isamu ; Yamamoto, Mitsuo ; Kondo, Yasuhiro ; Yasaka, Hiroshi ; Yoshikuni, Yuzo ; Oe, Kunishige

Author_Institution

NTT Opto-Electron. Labs., Kanagawa, Japan

Volume

14

Issue

10

fYear

1996

fDate

10/1/1996 12:00:00 AM

Firstpage

2344

Lastpage

2352

Abstract

We report on an InP-based optical multiplexer integrated with high-speed multiquantum-well (MQW) electroabsorption modulators for 100 Gb/s transmission. The optical multiplexer is based on a multimode interference (MMI) splitter, a waveguide array, and a taper-type combiner designed using the beam propagation method (BPM). The modulators are integrated on the top of the optical multiplexer. The integrated device is fabricated by three step epitaxy using metal organic vapor phase epitaxy (MOVPE) and by dry etching. The static and dynamic performances are measured, leading to the generation and the modulation of a 100 GHz optical pulse train. This optical pulse train is also coded using a pseudorandom nonreturn to zero (NRZ) pattern

Keywords

III-V semiconductors; arrays; electro-optical modulation; electroabsorption; etching; high-speed optical techniques; indium compounds; integrated optics; multiplexing equipment; optical communication equipment; optical elements; optical fabrication; optical variables measurement; semiconductor quantum wells; time division multiplexing; vapour phase epitaxial growth; 100 GHz; 100 Gbit/s; InP; InP-based optical multiplexer; MQW modulators; beam propagation method; dry etching; dynamic performances; fabrication; high-speed multiquantum-well electroabsorption modulators; integrated device; metal organic vapor phase epitaxy; monolithic integration; multimode interference splitter; optical multiplexer; optical pulse train; pseudorandom nonreturn to zero pattern; static performances; taper-type combiner; three step epitaxy; waveguide array; Epitaxial growth; High speed optical techniques; Integrated optics; Monolithic integrated circuits; Multiplexing; Optical arrays; Optical modulation; Optical pulses; Optical waveguides; Quantum well devices;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.541227

Filename

541227