Title :
A CMOS ultrasound range-finder microsystem
Author :
Kuratli, Christoph ; Huang, Qiuting
Author_Institution :
Integrated Syst. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
Abstract :
A miniaturized ultrasound range finder in a standard 0.8-/spl mu/m CMOS technology is described. It uses thermally excited silicon membrane transducers to generate or detect ultrasound at 100 kHz and can measure distances up to 11 cm with an accuracy of 2.5 mm. The distance sensor is based on a quasi-continuous measurement requiring coherent ultrasound waves, that are delivered by an electro-mechanical phase locked loop. Circuit and system techniques as well as package considerations are presented which allow the range finder to be implemented as a fully integrated 0.8-/spl mu/m CMOS microsystem.
Keywords :
CMOS integrated circuits; distance measurement; integrated circuit packaging; microsensors; ultrasonic transducers; 0 to 11 cm; 0.8 micron; 100 kHz; CMOS; coherent ultrasound waves; distance sensor; electro-mechanical phase locked loop; package considerations; quasi-continuous measurement; thermally excited membrane transducers; ultrasound range-finder microsystem; Biomembranes; CMOS technology; Circuits and systems; Integrated circuit measurements; Phase locked loops; Phase measurement; Silicon; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;
Journal_Title :
Solid-State Circuits, IEEE Journal of
