Characteristics of valley microstrip lines for use in multilayer MMIC´s

Author

Hasegawa, Takao ; Banba, Seiichi ; Ogawa, Hiroyo

Author_Institution

ATR Opt. & Radio Commun. Res. Lab., Kyoto, Japan

Volume

1

Issue

10

fYear

1991

Firstpage

275

Lastpage

277

Abstract

A valley microstrip line fabricated by using multilayer monolithic microwave integrated circuit (MMIC) technologies is proposed, and its performance was investigated experimentally. Each transmission line was measured by using on-wafer probers and a HP8510 network analyzer. Four microstrip lines with dielectric overlay, whose polyimide layer thickness/strip conductor widths were 2.5 mu m/5 mu m, 5 mu m/10 mu m, 7.5 mu m/16 mu m, and 10 mu m/22 mu m were measured. Characteristic impedance of each line is 50 Omega . For the valley microstrip line, the polyimide layer thickness underneath varies from 3-10 mu m. With a strip conductor width of 6 mu m, the characteristic impedance is 50 Omega .<>

Keywords

MMIC; electric impedance; strip line components; 2.5 to 22 micron; characteristic impedance; dielectric overlay; monolithic microwave integrated circuit; multilayer MMIC; polyimide layer thickness; strip conductor widths; valley microstrip lines; Conductors; Dielectric measurements; Impedance; MMICs; Microstrip; Microwave integrated circuits; Nonhomogeneous media; Polyimides; Strips; Transmission line measurements;

fLanguage

English

Journal_Title

Microwave and Guided Wave Letters, IEEE

Publisher

ieee

ISSN

1051-8207

Type

jour

DOI

10.1109/75.89094

Filename

89094