Title :
Mixed-element decomposition method for three-dimensional grid adaptation
Author :
Leitner, Ernst ; Selberherr, Siegfried
Author_Institution :
Inst. for Microelectron., Tech. Univ. Wien, Austria
fDate :
7/1/1998 12:00:00 AM
Abstract :
A new method for adaptive tessellation of three-dimensional (3-D) grids is presented. A mixed-element decomposition method is introduced for local refinement of fully unstructured grids, consisting of tetrahedra and octahedra. The method preserves the shape of the elements of the initial grid and therefore the element quality. Furthermore, local anisotropies of the initial grid are preserved. The developed implementation allows efficient adaptation and is used in a finite element program for simulation of thermal diffusion processes
Keywords :
finite element analysis; mesh generation; semiconductor process modelling; thermal diffusion; IC processing; adaptive tessellation; finite element simulation; local anisotropy; local refinement; mixed-element decomposition; thermal diffusion; three-dimensional grid adaptation; Analytical models; Anisotropic magnetoresistance; Circuit simulation; Computational modeling; Diffusion processes; Doping profiles; Finite element methods; Geometry; Mesh generation; Shape;
Journal_Title :
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
