Abnormal Dopant Distribution in $\\hbox {POCl}_{3}$ -Diffused $\\hbox {N}^{+}$ Emitter of Textur

Author

Ok, Young-Woo ; Rohatgi, Ajeet ; Kil, Yeon-Ho ; Park, Sung-Eun ; Kim, Dong-Hwan ; Lee, Joon-Sung ; Choi, Chel-Jong

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

32

Issue

3

fYear

2011

fDate

3/1/2011 12:00:00 AM

Firstpage

351

Lastpage

353

Abstract

We investigated 2-D dopant distribution in a -diffused emitter formed on textured Si solar cells using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and simulation results demonstrate that the convex and concave regions of a pyramid in the textured Si surface show deeper and shallower junctions, respectively. By considering a strong dependence of phosphorus (P) diffusion on the Si interstitials, the abnormal profile of emitter in the textured Si surface could be attributed to the inhomogeneous distribution of Si interstitials caused by the geometry of the pyramid texture.

Keywords

etching; interstitials; nitrogen; phosphorus compounds; semiconductor junctions; solar cells; surface diffusion; surface texture; transmission electron microscopy; 2D dopant distribution; POCl₃-N⁺; Si; TEM; emitter; pyramid texture; selective chemical etching; shallow junctions; textured silicon solar cells; transmission electron microscopy; Junction; Si interstitial; selective chemical etching; solar cells; transmission electron microscopy (TEM);

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2010.2098840

Filename

5680936

Abnormal Dopant Distribution in -Diffused Emitter of Textur

Ok, Young-Woo ; Rohatgi, Ajeet ; Kil, Yeon-Ho ; Park, Sung-Eun ; Kim, Dong-Hwan ; Lee, Joon-Sung ; Choi, Chel-Jong

jour

Abnormal Dopant Distribution in $\\hbox {POCl}_{3}$ -Diffused $\\hbox {N}^{+}$ Emitter of Textur