Title :
Innovative practices session 2C: Advanced in yield learning
Author :
Lin, Yen-Tzu ; Benware, Brady ; Stine, Brian ; Bhavnagarwala, Azeez
Author_Institution :
Nvidia
Abstract :
The onset of FinFET technology nodes brings with it additional challenges in ramping yields due to new defect behaviors and new hardships in the physical failure analysis process. This presentation highlights these challenges and makes the argument that improved scan based diagnosis capabilities that leverage a transistor level understanding of the cells will be necessary to combat these challenges.
Keywords :
Abstracts; FinFETs; Graphics; Metrology; Random access memory; Threshold voltage; Very large scale integration;
Conference_Titel :
VLSI Test Symposium (VTS), 2014 IEEE 32nd
Conference_Location :
Napa, CA, USA
DOI :
10.1109/VTS.2014.6818749