DocumentCode :
1420274
Title :
Improved surface-micromachined hinges for fold-out structures
Author :
Friedberger, Alois ; Muller, Richard S.
Author_Institution :
Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Volume :
7
Issue :
3
fYear :
1998
fDate :
9/1/1998 12:00:00 AM
Firstpage :
315
Lastpage :
319
Abstract :
We describe a new surface-micromachined polysilicon micromechanical hinge that is designed for “foldout” surface-micromachined elements. The new hinge shows reduced wobble and enhanced accuracy as compared to previous foldout hinge designs. Features of the new hinge, which is built using only two structural layers of polycrystalline silicon, are two sets of cantilevers that are fixed to opposing hinge flanges. These cantilevers overlay an axle and thereby allow rotation while holding the rotating part to the support member. A precise locking mechanism for 90° out-of-plane rotation makes this hinge design especially suitable for applications to fixed-position vertical-foldout micromirrors. Measurements on such mirrors have confirmed predicted high precision in vertical locking. The new hinge has also permitted the construction of a mirror on a movable carriage that has been driven in a one-dimensional (1-D) sliding motion more than 100 μm by on-chip microvibromotors
Keywords :
elemental semiconductors; micromachining; micromechanical devices; silicon; 100 mum; 1D sliding motion; Si; cantilevers; fixed-position vertical-foldout micromirrors; fold-out structures; locking mechanism; movable carriage; on-chip microvibromotors; out-of-plane rotation; polysilicon micromechanical hinge; surface-micromachined hinges; wobble; Actuators; Axles; Bridges; Building materials; Fasteners; Flanges; Micromechanical devices; Micromirrors; Mirrors; Silicon;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/84.709650
Filename :
709650
Link To Document :
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