Title :
Characterization of dielectric and electro-optic properties of PLZT 9/65/35 films on sapphire for electro-optic applications
Author :
Tunaboylu, Bahadir ; Harvey, Phil ; Esener, Sadik C.
Author_Institution :
Dept. of Res. & Dev., Cerprobe Corp., Gilbert, AZ, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
Lead lanthanum zirconate titanate (PLZT) thin films were deposited on r-plane sapphire at low temperatures by RF triode magnetron sputtering using lead compensated hot-pressed targets. To obtain fully perovskite phase in the films, two types of post-deposition processing were investigated: rapid thermal annealing (RTA) and furnace annealing (FA). Dielectric and electro-optic properties of PLZT films were found to be strongly dependent on annealing conditions. The peak dielectric constant of the films were 1200 and 2800 with Curie temperatures of 110/spl deg/C and 190/spl deg/C after RTA and FA processing, respectively. The dielectric losses in the films were fairly low; tan deltas were less than 0.02 after RTA and less than 0.04 after FA processing. The films showed good optical transmission characteristics after annealing and an anomalously large effective quadratic electro-optic effect was observed in one furnace annealed film.
Keywords :
annealing; dielectric losses; electro-optical effects; ferroelectric Curie temperature; ferroelectric thin films; lanthanum compounds; lead compounds; permittivity; rapid thermal annealing; sapphire; sputtered coatings; Al/sub 2/O/sub 3/; Curie temperature; PLZT; PLZT film; PbLaZrO3TiO3; RF triode magnetron sputtering; dielectric constant; dielectric loss; dielectric properties; electro-optic properties; furnace annealing; hot pressed target; optical transmission; perovskite phase; rapid thermal annealing; sapphire substrate; Dielectric losses; Dielectric thin films; Furnaces; Lanthanum; Optical films; Radio frequency; Rapid thermal annealing; Sputtering; Temperature; Titanium compounds;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
