A new method to measure the distance between graduation lines on graduated scales

Author

Penzes, William B. ; Allen, Richard A. ; Cresswell, Michael W. ; Linholm, Loren W. ; Teag, E. Clayton

Author_Institution

Div. of Precision Eng., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

Volume

49

Issue

6

fYear

2000

fDate

12/1/2000 12:00:00 AM

Firstpage

1285

Lastpage

1288

Abstract

Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small, graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to the time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from this technique are presented

Keywords

calibration; distance measurement; instruments; measurement uncertainty; micrometry; potentiometers; distance measurement; electrical test structure metrology; graduated scales; graduation lines; line scale calibration; stage micrometer calibration; Calibration; Costs; Glass; Instruments; NIST; Optical interferometry; Optical microscopy; Substrates; Testing; Voltage;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.893272

Filename

893272