DocumentCode :
1422378
Title :
Modal analysis of practical quartz resonators using finite element method
Author :
Yang, Liu ; Vitchev, Nikolay ; Yu, Zhiping
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Volume :
57
Issue :
2
fYear :
2010
fDate :
2/1/2010 12:00:00 AM
Firstpage :
292
Lastpage :
298
Abstract :
Finite element simulation has been employed as a promising method in the analysis of piezoelectric active devices. It is desirable to obtain results consistent with experiments for real devices. In this paper, precise geometry models of quartz resonators were generated from direct measurements of practical devices and meshed. Realistic quartz blanks, electrodes, and mountings were included in the models. An application-specified 3-D finite element simulator was developed to perform the modal analysis of realistic crystal resonators. Using the model and simulator, real devices were simulated. Simulation results, including modal analysis and temperature properties, were shown in consistency with experimental measurements. The dependencies of device performance on practical factors were studied.
Keywords :
crystal resonators; electrodes; finite element analysis; modal analysis; SiO2; application-specified 3D finite element simulator; crystal resonator; electrodes; finite element method; geometry model; modal analysis; mountings; piezoelectric active device simulation; quartz blanks; quartz resonator; Analytical models; Electrodes; Finite element methods; Geometry; Modal analysis; Piezoelectric devices; Solid modeling; Temperature;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2010.1409
Filename :
5417188
Link To Document :
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