Title :
A four-terminal compact model for high voltage diffused resistors with field plates
Author :
Victory, James ; McAndrew, Colin C. ; Hall, Jeff ; Zunino, Mike
Author_Institution :
Motorola Inc., Le Grand Saconnex, Switzerland
fDate :
9/1/1998 12:00:00 AM
Abstract :
This paper presents a four-terminal, physically based, high-voltage diffused resistor model. The model accounts for depletion, inversion, and accumulation at the surface due to the MOS effect of metal field plates, as well as the depletion pinching effect at the sides and bottom of the diffused resistor
Keywords :
BiCMOS integrated circuits; accumulation layers; integrated circuit modelling; inversion layers; power integrated circuits; resistors; semiconductor device models; HV diffused resistors; MOS effect; accumulation effect; depletion pinching effect; four-terminal compact model; high voltage resistors; inversion effect; metal field plates; resistor model; Circuit simulation; Doping; Immune system; Integrated circuit modeling; Isolation technology; Resistors; SPICE; Semiconductor process modeling; Solid modeling; Voltage;
Journal_Title :
Solid-State Circuits, IEEE Journal of
