DocumentCode
1423268
Title
A four-terminal compact model for high voltage diffused resistors with field plates
Author
Victory, James ; McAndrew, Colin C. ; Hall, Jeff ; Zunino, Mike
Author_Institution
Motorola Inc., Le Grand Saconnex, Switzerland
Volume
33
Issue
9
fYear
1998
fDate
9/1/1998 12:00:00 AM
Firstpage
1453
Lastpage
1458
Abstract
This paper presents a four-terminal, physically based, high-voltage diffused resistor model. The model accounts for depletion, inversion, and accumulation at the surface due to the MOS effect of metal field plates, as well as the depletion pinching effect at the sides and bottom of the diffused resistor
Keywords
BiCMOS integrated circuits; accumulation layers; integrated circuit modelling; inversion layers; power integrated circuits; resistors; semiconductor device models; HV diffused resistors; MOS effect; accumulation effect; depletion pinching effect; four-terminal compact model; high voltage resistors; inversion effect; metal field plates; resistor model; Circuit simulation; Doping; Immune system; Integrated circuit modeling; Isolation technology; Resistors; SPICE; Semiconductor process modeling; Solid modeling; Voltage;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/4.711347
Filename
711347
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