Title :
Liquid Core ARROW Waveguides by Atomic Layer Deposition
Author :
Testa, Genni ; Huang, Yujian ; Zeni, Luigi ; Sarro, Pasqualina M. ; Bernini, Romeo
Author_Institution :
Ist. per il Rilevamento Elettromagnetico dell Ambiente, Consiglio Naz. delle Ric., Naples, Italy
fDate :
5/1/2010 12:00:00 AM
Abstract :
We report on the use of the atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits the deposition of a very conformal sub-100-nm titanium dioxide antiresonant layer. This results in a low loss liquid core ARROW waveguide with a broadband output transmission spectrum. Optical transmitted spectrum from the fabricated structure has been reported, and the measured attenuation losses agree with the theoretical predictions.
Keywords :
atomic layer deposition; light transmission; optical fabrication; optical losses; optical materials; optical waveguides; titanium compounds; TiO2; atomic layer deposition; attenuation loss; broadband optical transmitted spectrum; liquid core ARROW waveguides; liquid core antiresonant reflecting optical waveguides; optical fabrication; titanium dioxide antiresonant layer; Antiresonant reflecting optical waveguide (ARROW); atomic layer deposition (ALD); liquid waveguides;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2010.2043352
