Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Author

Jae Hoon Jung ; Byeoung Kwon Ja ; Yun Hi Lee ; Jin Jang ; Myung Hwan Oh

Author_Institution

Div. of Electron. & Inf. Technol., Korea Inst. of Technol., Seoul, South Korea

Volume

18

Issue

5

fYear

1997

fDate

5/1/1997 12:00:00 AM

Firstpage

197

Lastpage

199

Abstract

The effect of diamond like carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

Keywords

carbon; electron field emission; molybdenum; plasma CVD coatings; vacuum microelectronics; Mo-C; PECVD; current stability; diamond like carbon coating; electron emission efficiency; layer-by-layer deposition; molybdenum-tip field emitter array; turn-on voltage; Anodes; Carbon dioxide; Chemical vapor deposition; Diamond-like carbon; Electron emission; Field emitter arrays; Plasma chemistry; Plasma properties; Plasma stability; Voltage;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/55.568760

Filename

568760