Title :
Effects of internal scattering on X-ray microtomography image reconstruction
Author :
Kalukin, Andrew R.
Author_Institution :
Center for Integrated Electron. & Electron. Manuf., Rensselaer Polytech. Inst., Troy, NY, USA
fDate :
4/1/1997 12:00:00 AM
Abstract :
A computer simulation is used to study the problem of internal scattering for targets that are imaged using X-ray microtomography. A strategy is outlined for selecting X-ray energy and image resolution based on properties of the material being imaged. The X-ray scanning process is simulated by applying a Monte Carlo technique to a modeled target that emulates the material properties of a microelectronic device. The X-ray photons are subject to photoelectric absorption, Rayleigh scattering, and Compton scattering. The simulation applies a method of high-resolution image reconstruction based on discrete Fourier transforms. Examples of reconstructed images that have 0.5-μm spatial resolution are shown for images of simulated lead and aluminum targets
Keywords :
image reconstruction; image resolution; tomography; Compton scattering; Rayleigh scattering; X-ray energy; X-ray microtomography; X-ray microtomography image reconstruction; X-ray photons; discrete Fourier transforms; image resolution; internal scattering; microelectronic device; photoelectric absorption; simulated Al target; simulated Pb target; spatial resolution; Computational modeling; Computer simulation; Image reconstruction; Image resolution; Material properties; Monte Carlo methods; Particle scattering; Rayleigh scattering; X-ray imaging; X-ray scattering;
Journal_Title :
Nuclear Science, IEEE Transactions on
