Title :
PCLT/P(VDF-TrFE) nanocomposite pyroelectric sensors
Author :
Zhang, Qing-qi ; Chan, Helen Lai Wa ; Ploss, Bernd ; Choy, Chung Loong
Author_Institution :
Dept. of Appl. Phys., Hong Kong Polytech. Univ., Kowloon, China
Abstract :
Thin composite films consisting of 12 vol% of nanosized lanthanum and calcium-modified lead titanate (PCLT) powder embedded in a vinylidene fluoride-trifluoroethylene copolymer [P(VDF-TrFE)] matrix were deposited on silicon (Si) substrates to form pyroelectric sensors with three different configurations. The influences of a thermal buffer layer and back etching of the silicon substrate on the current and voltage responsivities of the sensors were investigated theoretically and experimentally. The specific detectivity of the sensors was also calculated from the measured voltage responsivity and noise.
Keywords :
etching; ferroelectric materials; filled polymers; lead compounds; nanostructured materials; polymer blends; polymer films; pyroelectric detectors; sol-gel processing; spin coating; P(VDF-TrFE)] matrix; PCLT/P(VDF-TrFE) nanocomposite; Si; Si substrate; back etching; current responsivity; ferroelectric copolymer; pyroelectric sensors; specific detectivity; thermal buffer layer; thin composite films; vinylidene fluoride-trifluoroethylene copolymer; voltage responsivity; Buffer layers; Etching; Lanthanum; Powders; Pyroelectricity; Semiconductor films; Silicon; Thin film sensors; Titanium compounds; Voltage;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
