DocumentCode
1426826
Title
PCLT/P(VDF-TrFE) nanocomposite pyroelectric sensors
Author
Zhang, Qing-qi ; Chan, Helen Lai Wa ; Ploss, Bernd ; Choy, Chung Loong
Author_Institution
Dept. of Appl. Phys., Hong Kong Polytech. Univ., Kowloon, China
Volume
48
Issue
1
fYear
2001
Firstpage
154
Lastpage
160
Abstract
Thin composite films consisting of 12 vol% of nanosized lanthanum and calcium-modified lead titanate (PCLT) powder embedded in a vinylidene fluoride-trifluoroethylene copolymer [P(VDF-TrFE)] matrix were deposited on silicon (Si) substrates to form pyroelectric sensors with three different configurations. The influences of a thermal buffer layer and back etching of the silicon substrate on the current and voltage responsivities of the sensors were investigated theoretically and experimentally. The specific detectivity of the sensors was also calculated from the measured voltage responsivity and noise.
Keywords
etching; ferroelectric materials; filled polymers; lead compounds; nanostructured materials; polymer blends; polymer films; pyroelectric detectors; sol-gel processing; spin coating; P(VDF-TrFE)] matrix; PCLT/P(VDF-TrFE) nanocomposite; Si; Si substrate; back etching; current responsivity; ferroelectric copolymer; pyroelectric sensors; specific detectivity; thermal buffer layer; thin composite films; vinylidene fluoride-trifluoroethylene copolymer; voltage responsivity; Buffer layers; Etching; Lanthanum; Powders; Pyroelectricity; Semiconductor films; Silicon; Thin film sensors; Titanium compounds; Voltage;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.895925
Filename
895925
Link To Document