Title :
Analysis of SAW propagation in gratings on ZnO/diamond substrates
Author :
Kitabayashi, Hiroyuki ; Smith, Peter M.
Author_Institution :
Dept. of Electr. & Comput. Eng., McMaster Univ., Hamilton, Ont., Canada
Abstract :
The space harmonic method is used to analyze surface acoustic wave (SAW) propagation under an infinite periodic metal grating on ZnO/diamond composite layered substrates. Dispersion properties for shorted and open gratings are derived as a function of the thickness of the grating electrodes. From these dispersion relations, the coupling of modes (COM) parameters are derived. Energy profiles inside ZnO/diamond show that the energies contained in each of the ZnO and diamond layers are of the same order when the thickness of the ZnO layer is P//spl pi/r (P=grating period) and that the energy is contained within two wavelengths below the ZnO/diamond interface.
Keywords :
II-VI semiconductors; diamond; elemental semiconductors; harmonic analysis; piezoelectric semiconductors; surface acoustic wave filters; ultrasonic dispersion; zinc compounds; SAW filters; SAW propagation; ZnO-C; composite layered substrates; coupling of modes parameters; dispersion properties; dispersion relations; energy profiles; grating period; infinite periodic metal grating; space harmonic method; Acoustic propagation; Acoustic waves; Dispersion; Electrodes; Gratings; Green´s function methods; Harmonic analysis; Power harmonic filters; Surface acoustic waves; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
