Title :
Linear control rules for production control of semiconductor fabs
Author :
Glassey, C. Roger ; Shanthikumar, Jeyaveerasingam George ; Seshadr, Sridhar
Author_Institution :
Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA
fDate :
11/1/1996 12:00:00 AM
Abstract :
We consider the problem of reducing the cycle time required for producing wafers at a given rate in high-volume single-product semiconductor fabs. Based on theoretical results, we propose a new method of input control that uses intersecting hyperplanes to decide when to release a new lot into the wafer fab. The release control rules constructed thus are said to belong to the class of linear control rules. We provide numerical examples to demonstrate that our method gives nearly optimal results for flowline and probabilistic reentrant flowline models. We then propose the linear control rule called descending control (DEC) and give a hybrid simulation-optimization procedure for determining DEC rules in real-life settings. We provide numerical results for the HP development fab model of Wein
Keywords :
Markov processes; dynamic programming; integrated circuit yield; linear systems; optimal control; production control; DEC rules; HP development fab model; cycle time; descending control; high-volume single-product semiconductor fabs; hybrid simulation-optimization procedure; intersecting hyperplanes; linear control rules; probabilistic reentrant flowline models; production control; release control rules; Control systems; Costs; Dispatching; Job shop scheduling; Lead time reduction; Operations research; Optimal control; Production control; Semiconductor device modeling; Testing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on