Coupled circuit, field and temperature model of an induction plasma installation

Author

Ploteau, J.P. ; Fouladgar, J. ; Develey, G.

Author_Institution

GE44, LRTI, Saint Nazaire, France

Volume

34

Issue

5

fYear

1998

fDate

9/1/1998 12:00:00 AM

Firstpage

3198

Lastpage

3201

Abstract

A high frequency (HF) induction plasma installation is studied. An analytical model of the generator using optimization is coupled to a voltage driven model of the plasma. The electromagnetic equation of the system is solved by coupling the moment method (MM), the boundary integral method (BIM) and the finite difference method (FDM). The results are used to calculate the temperature distribution inside the plasma using the control volume method (CVM). A hierarchical algorithm is introduced to orchestrate the exchange between the sub-systems. The magnetic field and the temperature inside the plasma are measured by water cooled probes to validate the model

Keywords

boundary integral equations; finite difference methods; induction heating; magnetic fields; method of moments; optimisation; plasma heating; plasma production; plasma temperature; temperature distribution; thermal analysis; HF induction plasma installation; boundary integral method; control volume method; coupled circuit/field/temperature model; electromagnetic equation; finite difference method; hierarchical algorithm; moment method; optimization; plasma magnetic field; plasma temperature; sub-systems exchange; temperature distribution; voltage-driven model; Analytical models; Coupling circuits; Electromagnetic coupling; Finite difference methods; Frequency; Hafnium; Integral equations; Magnetic field measurement; Plasma measurements; Plasma temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.717750

Filename

717750