DocumentCode
1430865
Title
Flying height measurement using frustrated total reflection: determination of the reflectivities by the least-squares method
Author
Mori, Sadao ; Sugawara, Hiroyuki ; Tokisue, Hiromitsu ; Kinoshita, Kazuto
Author_Institution
Mech. Eng. Res. Lab., Hitachi Ltd., Ibaraki, Japan
Volume
34
Issue
5
fYear
1998
fDate
9/1/1998 12:00:00 AM
Firstpage
3783
Lastpage
3785
Abstract
A new method for determining reflectivities in flying height measurement of a slider using frustrated total reflection (FTR) sensor is evaluated. The method is based on the fact that the reflectivity of FTR has different dependence on flying height for P-polarized light and S-polarized light. The flying height of a slider on a glass disk was measured both by an FTIP sensor using this method and by a traditional flying height tester. The results agree with each other with an error of less than 3 nm
Keywords
height measurement; least squares approximations; magnetic heads; optical sensors; reflectivity; FTR sensor; P-polarized light; S-polarized light; flying height measurement; frustrated total reflection; glass disk; least squares method; magnetic recording head; reflectivity; slider; Glass; Insulation; Magnetic heads; Magnetic sensors; Optical interferometry; Optical polarization; Optical reflection; Reflectivity; Refractive index; Testing;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.718542
Filename
718542
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