Title :
Flying height measurement using frustrated total reflection: determination of the reflectivities by the least-squares method
Author :
Mori, Sadao ; Sugawara, Hiroyuki ; Tokisue, Hiromitsu ; Kinoshita, Kazuto
Author_Institution :
Mech. Eng. Res. Lab., Hitachi Ltd., Ibaraki, Japan
fDate :
9/1/1998 12:00:00 AM
Abstract :
A new method for determining reflectivities in flying height measurement of a slider using frustrated total reflection (FTR) sensor is evaluated. The method is based on the fact that the reflectivity of FTR has different dependence on flying height for P-polarized light and S-polarized light. The flying height of a slider on a glass disk was measured both by an FTIP sensor using this method and by a traditional flying height tester. The results agree with each other with an error of less than 3 nm
Keywords :
height measurement; least squares approximations; magnetic heads; optical sensors; reflectivity; FTR sensor; P-polarized light; S-polarized light; flying height measurement; frustrated total reflection; glass disk; least squares method; magnetic recording head; reflectivity; slider; Glass; Insulation; Magnetic heads; Magnetic sensors; Optical interferometry; Optical polarization; Optical reflection; Reflectivity; Refractive index; Testing;
Journal_Title :
Magnetics, IEEE Transactions on
