Title :
Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization
Author :
Jewell, Jack L. ; Harbison, J.P. ; Scherer, A. ; Lee, Y.H. ; Florez, L.T.
Author_Institution :
AT&T Bell Labs., Holmdel, NJ, USA
fDate :
6/1/1991 12:00:00 AM
Abstract :
The authors have designed, fabricated, and tested vertical-cavity surface-emitting lasers (VCSEL) with diameters ranging from 0.5 μm to>50 μm. Design issues, molecular beam epitaxial growth, fabrication, and lasing characteristics are discussed. The topics considered in fabrication of VCSELs are microlaser geometries; ion implementation and masks; ion beam etching packaging and arrays, and ultrasmall devices
Keywords :
laser cavity resonators; molecular beam epitaxial growth; semiconductor junction lasers; sputter etching; Design; arrays; characterization; diameters; fabrication; growth; ion beam etching; ion implementation; lasing characteristics; masks; microlaser geometries; molecular beam epitaxial growth; packaging; ultrasmall devices; vertical-cavity surface-emitting lasers; Etching; Geometrical optics; Ion beams; Molecular beam epitaxial growth; Optical design; Optical device fabrication; Packaging; Surface emitting lasers; Testing; Vertical cavity surface emitting lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of
