Title :
Characterization of bolometers based on polycrystalline silicon germanium alloys
Author :
Sedky, S. ; Fiorini, P. ; Caymax, M. ; Baert, C. ; Hermans, L. ; Mertens, R.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
In this paper, we report on the first realization and characterization of uncooled Infra Red (IR) bolometers, based on polycrystalline alloys of silicon and germanium (poly SiGe). Responsivity, thermal conductance, thermal time constant and noise will be analyzed. It will be shown that poly SiGe provides high thermal insulation. An average detectivity of 10/sup 8/ cm/spl radic/(Hz)/W has been measured. We expect that modifications in the device structure could allow to achieve detectivities of 10/sup 9/ cm /spl radic/(Hz)/W.
Keywords :
Ge-Si alloys; bolometers; infrared detectors; semiconductor materials; Si-Ge; detectivity; infrared bolometer; noise; polycrystalline silicon germanium alloy; responsivity; thermal conductance; thermal insulation; thermal time constant; Amorphous semiconductors; Bolometers; Germanium alloys; Germanium silicon alloys; Immune system; Integrated circuit noise; Semiconductor device noise; Silicon alloys; Silicon germanium; Thermal conductivity;
Journal_Title :
Electron Device Letters, IEEE
