Title :
EUV and Soft X-Ray Quantum Efficiency Measurements of a Thinned Back-Illuminated CMOS Active Pixel Sensor
Author :
Stern, Robert A. ; Shing, Lawrence ; Waltham, Nick ; Mapson-Menard, Helen ; Harris, Andrew ; Pool, Peter
Author_Institution :
Solar & Astrophys. Lab., Lockheed Martin Adv. Technol. Center, Palo Alto, CA, USA
fDate :
3/1/2011 12:00:00 AM
Abstract :
We report the first absolute effective quantum efficiency (e-h pairs collected/predicted) measurements of a monolithic thinned back-illuminated CMOS active pixel sensor (APS) in the extreme ultraviolet and soft X-ray region (13-600 Å). The sensor was designed and fabricated under a joint Rutherford Appleton Laboratory/e2v research program and characterized in the Lockheed Martin Solar and Astrophysics calibration facility. We compare our QE results to the data and models developed for thinned CCDs with similar back surface passivation. Our results demonstrate that CMOS APS arrays show significant promise for use in space-based solar physics and astrophysics missions.
Keywords :
CMOS image sensors; ion implantation; laser beam annealing; EUV; soft X-ray quantum efficiency measurements; thinned back-illuminated CMOS active pixel sensor; Active pixel sensors (APSs); X-ray astronomy detectors; image sensors; ultraviolet detectors;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2010.2100362
