Title :
How low can you go? [Electronics Forecasts]
Abstract :
The paper gives an overview on the limit on the semiconductor device scaling and the impact of this technology scaling on its economics. It tackles the issues in the process development in the nanometer scale and what engineers can do to improve the semiconductor device density.
Keywords :
integrated circuit design; integrated circuit manufacture; semiconductor technology; technological forecasting; semiconductor device density; semiconductor device scaling; semiconductor process development; semiconductor process technology;
Journal_Title :
Engineering & Technology
