Title :
Online computer control of an evaporation process
Author :
Steiner, D.J. ; Sandoz, D.J.
Author_Institution :
University of Liverpool, Department of Electrical Engineering & Electronics, Liverpool, UK
fDate :
8/1/1974 12:00:00 AM
Abstract :
The paper describes the application of single-input/single-output discrete linear-control theory to control the evaporation of various dielectric material in a vacuum chamber. The process is modelled using a recursive least-squares method and a controller is designed from the model. Process nonlinearity is shown to inhibit the performance of linear feedback control. A compensation is introduced to overcome this difficulty, and an effective final control design is achieved.
Keywords :
control engineering applications of computers; dielectric materials; evaporation; process control; vapour deposition; evaporation process; online computer control; process control; vacuum deposition;
Journal_Title :
Electrical Engineers, Proceedings of the Institution of
DOI :
10.1049/piee.1974.0206
