Title :
Reducing the substrate losses of RF integrated inductors
Author :
Mernyei, Ferenc ; Darrer, Franz ; Pardoen, Matthijs ; Sibrai, Andreas
Author_Institution :
Budapest Design Office, Austria Mikro Syst. Int. AG, Budapest, Hungary
fDate :
9/1/1998 12:00:00 AM
Abstract :
The authors introduce a new method for reducing the substrate-related losses of integrated spiral inductors for Si RF ICs. Measurement based equivalent circuit parameters are demonstrated. Using our method the quality factor increased from 5.3 to 6.0 at 3.5 GHz at an 1.8 nH inductor
Keywords :
MMIC; Q-factor; UHF integrated circuits; eddy current losses; equivalent circuits; inductors; silicon; 2.2 to 3.5 GHz; RF integrated inductors; Si; Si RF ICs; equivalent circuit parameters; onchip spiral inductors; quality factor; radiofrequency applications; substrate losses reduction; Eddy currents; Equivalent circuits; Inductors; Integrated circuit measurements; Q factor; Radio frequency; Radiofrequency integrated circuits; Silicon; Spirals; Substrates;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
