• DocumentCode
    1434265
  • Title

    Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

  • Author

    Hofstetter, Daniel ; Maisenhölder, Bernd ; Zappe, Hans P.

  • Author_Institution
    Paul Scherrer Inst., Zurich, Switzerland
  • Volume
    4
  • Issue
    4
  • fYear
    1998
  • Firstpage
    794
  • Lastpage
    802
  • Abstract
    Various applications of quantum-well intermixing, ranging from multiwavelength lasers to complex photonic integrated circuits, are described. The fabrication of these GaAs-AlGaAs-based devices relies on the postgrowth definition of regions with varying bandgap, enabling the manufacture of wavelength shifted modulators and lasers, as well as the integration of transparent waveguides with absorbing lasers and detectors. The impurity-free vacancy-enhanced disordering technique employed, and its integration with existing process technologies, will be presented, and examples of multicolor lasers, wavelength shifted modulators and integrated optical interferometers are shown. These applications yield high-optical functionality using relatively simple process and integration technology
  • Keywords
    III-V semiconductors; aluminium compounds; chemical interdiffusion; electro-optical modulation; gallium arsenide; integrated circuit technology; integrated optoelectronics; optical fabrication; quantum well lasers; semiconductor technology; GaAs-AlGaAs; GaAs-AlGaAs-based devices; absorbing lasers; chemical interdiffusion; complex photonic integrated circuits; detectors; existing process technologies; high-optical functionality; impurity-free vacancy-enhanced disordering technique; integrated optical interferometers; integration technology; multicolor lasers; multiwavelength lasers; photonic integrated circuits; postgrowth definition; process technology; quantum-well intermixing; semiconductor laser fabrication; transparent waveguides; varying bandgap; wavelength shifted modulator fabrication; wavelength shifted modulators; Integrated optics; Manufacturing; Optical device fabrication; Optical interferometry; Optical modulation; Optical waveguides; Photonic band gap; Photonic integrated circuits; Quantum well lasers; Waveguide lasers;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/2944.720492
  • Filename
    720492