Electrical-Thermal Co-Simulation of 3D Integrated Systems With Micro-Fluidic Cooling and Joule Heating Effects

In this paper, the electrical-thermal co-simulation of 3D systems with Joule heating, fluidic cooling and air convection effects is proposed. The finite-volume method formulations of voltage distribution equation, heat equations for both fluid flow and solid medium with nonuniform mesh are explained in detail. Based on the proposed iterative co-simulation method, package temperature distribution and voltage drop with Joule heating and fluidic cooling effects can be estimated. Several packaging examples are simulated and the results show that with micro-channel fluidic cooling in high power density 3D integrated packages, the thermal effect on voltage drop is reduced by 10% which is much less than that of using a traditional heat sink.