DocumentCode
1435292
Title
Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils
Author
Demokan, Ordal
Author_Institution
Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA
Volume
28
Issue
5
fYear
2000
fDate
10/1/2000 12:00:00 AM
Firstpage
1720
Lastpage
1724
Abstract
A novel scheme for ion deposition and possibly ion implantation on the inner surfaces of cylindrical targets is proposed and experimentally tested. A large current is passed through a coaxial cable-type structure, composed of a straight conductor and a thin metallic foil, surrounding it. The foil evaporates and ionizes forming a metallic plasma, which is pushed radially outward due to the pressure of the magnetic field, confined to the region between the plasma and the conductor. The ions of the foil material are observed to be deposited uniformly on the inner surface of a cylindrical target, enclosing this structure coaxially. Auger analysis on the target implies a possible implantation as well, but this implication needs to be supported by further, extensive measurements, before a concrete statement can be made. The outcome of this pioneering experiment is far from being perfect, but is encouraging. Suggestions for improving the quality of the outcome are made for this promising, single-shot deposition procedure
Keywords
Auger effect; exploding wires; explosions; ion implantation; metals; pinch effect; plasma deposition; plasma production; plasma sheaths; surface treatment; Auger analysis; coaxial cable-type structure; conductor; cylinders; cylindrical target; deposition; exploding metallic foils; foil material; implantation; inner surface; inner surfaces; ion deposition; ion implantation; ions; magnetic field; metallic plasma; plasma; pressure; single-shot deposition procedure; straight conductor; thin metallic foil; Coaxial cables; Conducting materials; Ion implantation; Magnetic confinement; Magnetic fields; Plasma confinement; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Testing;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.901259
Filename
901259
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