• DocumentCode
    1438290
  • Title

    A physically based compact device model for fully depleted and nearly fully depleted SOI MOSFET

  • Author

    Banna, Srinivasa R. ; Chan, Philip C.H. ; Chan, Mansun ; Ko, Ping K.

  • Author_Institution
    Hong Kong Univ. of Sci. & Technol., Kowloon, Hong Kong
  • Volume
    43
  • Issue
    11
  • fYear
    1996
  • fDate
    11/1/1996 12:00:00 AM
  • Firstpage
    1914
  • Lastpage
    1923
  • Abstract
    A compact submicrometer Fully Depleted Silicon-On-Insulator (FDSOI) and Nearly FDSOI MOSFET device model suitable for analog as well as digital application has been proposed. It is an all region model. In developing this model care has been taken in retaining the basic functional form of physical models while improving the model accuracy and computational efficiency. In addition to the commonly included effects in the FDSOI MOSFET model, we have given careful consideration to parasitic source/drain resistance, Drain Induced Conductivity Enhancement (DICE) effect, floating body effect, self-heating and model continuity. A single parameter set is used for a large set of device dimensions except threshold voltage and parasitic source/drain resistance due to silicon film thickness variations. The accuracy of the model is validated with experimental data using NMOS FDSOI devices and found to be in good agreement
  • Keywords
    MOS integrated circuits; MOSFET; ULSI; circuit analysis computing; digital simulation; semiconductor device models; silicon-on-insulator; DICE; FDSOI; SOI MOSFET; all region model; computational efficiency; drain induced conductivity enhancement; film thickness variations; floating body effect; fully depleted transistors; model accuracy; model continuity; nearly fully depleted transistors; parasitic source/drain resistance; physically based compact device model; self-heating; Conductive films; Electrical resistance measurement; Equations; Immune system; MOSFET circuits; Polynomials; Surface fitting; Surface resistance; Threshold voltage; Two dimensional displays;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.543027
  • Filename
    543027