Title :
A physically based compact device model for fully depleted and nearly fully depleted SOI MOSFET
Author :
Banna, Srinivasa R. ; Chan, Philip C.H. ; Chan, Mansun ; Ko, Ping K.
Author_Institution :
Hong Kong Univ. of Sci. & Technol., Kowloon, Hong Kong
fDate :
11/1/1996 12:00:00 AM
Abstract :
A compact submicrometer Fully Depleted Silicon-On-Insulator (FDSOI) and Nearly FDSOI MOSFET device model suitable for analog as well as digital application has been proposed. It is an all region model. In developing this model care has been taken in retaining the basic functional form of physical models while improving the model accuracy and computational efficiency. In addition to the commonly included effects in the FDSOI MOSFET model, we have given careful consideration to parasitic source/drain resistance, Drain Induced Conductivity Enhancement (DICE) effect, floating body effect, self-heating and model continuity. A single parameter set is used for a large set of device dimensions except threshold voltage and parasitic source/drain resistance due to silicon film thickness variations. The accuracy of the model is validated with experimental data using NMOS FDSOI devices and found to be in good agreement
Keywords :
MOS integrated circuits; MOSFET; ULSI; circuit analysis computing; digital simulation; semiconductor device models; silicon-on-insulator; DICE; FDSOI; SOI MOSFET; all region model; computational efficiency; drain induced conductivity enhancement; film thickness variations; floating body effect; fully depleted transistors; model accuracy; model continuity; nearly fully depleted transistors; parasitic source/drain resistance; physically based compact device model; self-heating; Conductive films; Electrical resistance measurement; Equations; Immune system; MOSFET circuits; Polynomials; Surface fitting; Surface resistance; Threshold voltage; Two dimensional displays;
Journal_Title :
Electron Devices, IEEE Transactions on