Ka-band micromachined microstrip patch antenna

This study presents the design of a micromachined microstrip patch antenna at Ka-band frequencies. The design of the antenna is based on selective lateral etching by micromachining techniques to enhance the performance of a microstrip patch antenna on silicon (Si) substrate. In this design, the silicon material is removed laterally underneath the radiating patch to provide a cavity that consists of a combination of air and substrate in a defined ratio. The effect of the cavity is to produce a low effective dielectric region around the patch. The test results show superior performance over conventional designs where the bandwidth and efficiency have increased by as much as 50 and 25%, respectively.