• DocumentCode
    1438550
  • Title

    Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

  • Author

    Park, S.-J. ; Chen, J. ; Liu, C. ; Eden, J.G.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
  • Volume
    37
  • Issue
    3
  • fYear
    2001
  • fDate
    2/1/2001 12:00:00 AM
  • Firstpage
    171
  • Lastpage
    172
  • Abstract
    Microdischarge devices having (50-100 μm)2 pyramidal Si anodes and metal screen cathodes have been operated continuously at Ne gas pressures up to 1350 Torr and voltages below 95 V. More than 34 μW of output power is produced by a single device in a solid angle of ~5×10-2 sr for a Ne pressure of 500 Torr. 3×3 arrays of these devices have been fabricated
  • Keywords
    elemental semiconductors; glow discharges; mesoscopic systems; semiconductor plasma; silicon; 1350 torr; 34 muW; Si; metal screen cathodes; microdischarge device arrays; output power; screen cathodes; solid angle; square pyramidal anodes;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20010086
  • Filename
    902794
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1438550