• DocumentCode
    1439672
  • Title

    Inductively coupled surface acoustic wave device for sensor application

  • Author

    Beck, Klaus ; Wohlfahrt, Matthias ; Rügemer, Angelika ; Reiss, Sebastian ; Von Schickfus, Manfred ; Hunklinger, Siegfried

  • Author_Institution
    Inst. fur Angewandte Phys., Heidelberg Univ., Germany
  • Volume
    45
  • Issue
    5
  • fYear
    1998
  • Firstpage
    1140
  • Lastpage
    1144
  • Abstract
    We present a new type of surface acoustic wave device for sensor applications where the need for bonding wires is eliminated. Instead the device is coupled inductively to the RF circuitry. The impedance of such devices and the necessary matching have been investigated both theoretically and experimentally. The devices have repeatedly been operated at temperatures up to 400/spl deg/C and have shown a good temperature resistance. In order to test the suitability of the new concept for sensor applications, several devices with an operating frequency of 363 MHz were coated with copper phthalocyanine for the detection of NO/sub 2/. From these measurements we derive a detection limit of these devices below 1 ppb for NO/sub 2/.
  • Keywords
    gas sensors; nitrogen compounds; surface acoustic wave sensors; 0 to 400 degC; 363 MHz; NO/sub 2/; bonding wires; detection limit; gas detection; inductively coupled surface acoustic wave device; operating frequency; sensor application; temperature resistance; Acoustic sensors; Acoustic waves; Bonding; Circuit testing; Coupling circuits; Radio frequency; Surface acoustic wave devices; Surface impedance; Temperature sensors; Wires;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.726436
  • Filename
    726436