DocumentCode
1439672
Title
Inductively coupled surface acoustic wave device for sensor application
Author
Beck, Klaus ; Wohlfahrt, Matthias ; Rügemer, Angelika ; Reiss, Sebastian ; Von Schickfus, Manfred ; Hunklinger, Siegfried
Author_Institution
Inst. fur Angewandte Phys., Heidelberg Univ., Germany
Volume
45
Issue
5
fYear
1998
Firstpage
1140
Lastpage
1144
Abstract
We present a new type of surface acoustic wave device for sensor applications where the need for bonding wires is eliminated. Instead the device is coupled inductively to the RF circuitry. The impedance of such devices and the necessary matching have been investigated both theoretically and experimentally. The devices have repeatedly been operated at temperatures up to 400/spl deg/C and have shown a good temperature resistance. In order to test the suitability of the new concept for sensor applications, several devices with an operating frequency of 363 MHz were coated with copper phthalocyanine for the detection of NO/sub 2/. From these measurements we derive a detection limit of these devices below 1 ppb for NO/sub 2/.
Keywords
gas sensors; nitrogen compounds; surface acoustic wave sensors; 0 to 400 degC; 363 MHz; NO/sub 2/; bonding wires; detection limit; gas detection; inductively coupled surface acoustic wave device; operating frequency; sensor application; temperature resistance; Acoustic sensors; Acoustic waves; Bonding; Circuit testing; Coupling circuits; Radio frequency; Surface acoustic wave devices; Surface impedance; Temperature sensors; Wires;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.726436
Filename
726436
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