Title :
Comparison of lumped-element and transmission-line models for thickness-shear-mode quartz resonator sensors
Author :
Cernosek, Richard W. ; Martin, Stephen J. ; Hillman, A. Robert ; Bandey, Helen L.
Author_Institution :
Dept. of Microsensor Res. & Dev., Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Both a transmission-line model and its simpler variant, a lumped-element model, can be used to predict the responses of a thickness-shear-mode quartz resonator sensor. Relative deviations in the parameters computed by the two models (shifts in resonant frequency and motional resistance) do not exceed 3% for most practical sensor configurations operating at the fundamental resonance. If the ratio of the load surface mechanical impedance to the quartz shear characteristic impedance does not exceed 0.1, the lumped-element model always predicts responses within 1% of those for the transmission-line model.
Keywords :
chemical sensors; crystal resonators; equivalent circuits; microbalances; SiO/sub 2/; liquid loading; load surface mechanical impedance; lumped-element model; motional resistance shift; one-port electrical device; pure mass loading; quartz shear characteristic impedance; resonant frequency shift; thickness-shear-mode quartz resonator sensors; transmission-line model; viscoelastic film loading; Electrical resistance measurement; Mechanical sensors; Predictive models; Resonance; Resonant frequency; Sensor phenomena and characterization; Surface impedance; Surface resistance; Surface treatment; Transmission lines;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on